Non-volatile memory device with plural reference cells, and method of setting the reference cells

ABSTRACT

A non-volatile memory device has an array of non-volatile memory cells, a first plurality of non-volatile memory reference cells, with each reference cell capable of being programmed to a reference level different from the other reference cells; and a second plurality of comparators. Each of the comparators is connectable to one of the first plurality of non-volatile memory reference cells and to one of a third plurality of memory cells from among the array of non-volatile memory cells.

TECHNICAL FIELD

The present invention relates to a nonvolatile memory device and more particularly to a non-volatile memory device with an array of non-volatile memory cells with a plurality of non-volatile reference cells wherein each reference cell is capable of being programmed to a different level from the other reference cells.

BACKGROUND OF THE INVENTION

A non-volatile memory device having an array of non-volatile memory cells is well known in the art. Typically, a device also has a number of non-volatile reference memory cells provided with the array. In addition, typically, multiple comparators are provided with the array of non-volatile memory cells to provide for parallel reading. Each comparator is associated with a group of the non-volatile memory cells in the array. Further, each comparator is connected to one of the reference cells, and uses the signal from the reference cell and compares it to the associated group of memory cells. Finally, in the prior art, all of the comparators are either all connected to a single non-volatile memory reference cell or all of the comparators are connected to a number of non-volatile memory reference cells wherein all of the non-volatile memory reference cells are set to the same targeted signal value.

Because of process variations, and other anomalies, the I-V (current-voltage) characteristics of individual transistors in the comparators will have different offsets and cause the comparators to have different “effective reference levels”. This results in the operating window being larger than otherwise necessary to take into account such large difference in the reference levels.

SUMMARY OF THE INVENTION

Accordingly, in the present invention, a non-volatile memory device has an array of non-volatile memory cells and a first plurality of non-volatile memory reference cells. Each of the non-volatile reference cells is capable of being programmed to a reference level different from the other reference cells. In addition, the memory device comprises a second plurality of comparators. Each of the comparators is connectable to one of the first plurality of non-volatile memory reference cells and to one of a third plurality of memory cells from among the array of non-volatile memory cells.

The present invention also relates to methods for programming the non-volatile reference cells to selected target values.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block level diagram of a memory device of the present invention.

FIG. 2A is a schematic block level diagram of one embodiment of the memory device of the present invention showing the programming of the reference cells. FIG. 2B is a flowchart showing the method of programming the reference cells in accordance with the embodiment shown in FIG. 2A.

FIG. 3A is a schematic block level diagram of another embodiment of the memory device of the present invention showing the programming of the reference cells. FIG. 3B is a flowchart showing the method of programming the reference cells in accordance with the embodiment shown in FIG. 3A.

FIG. 4A is a schematic block level diagram of yet another embodiment of the memory device of the present invention showing the programming of the reference cells. FIG. 4B is a flowchart showing the method of programming the reference cells in accordance with the embodiment shown in FIG. 4A.

DETAILED DESCRIPTION OF THE INVENTION

Referring to FIG. 1, there is shown a block level diagram of a memory device 10 of the present invention. The device 10 comprises an array 20 of non-volatile memory cells. As is well known, the array 20 of non-volatile memory cells is arranged in a plurality of rows and columns, although one skilled in the art would appreciate that the term “row” and “column” may be interchanged. Further, the array 20 is divided into a plurality of groups (although only 2 groups 22 a and 22 b are shown, it is clear to those skilled in the art, that the array 20 may be divided into more than 2 groups). Further, within each group, e.g. 22 a, the group is subdivided yet into a plurality of subgroups, e.g. 20 a, 20 b and 20 c of non-volatile memory cells. Further, each subgroup, e.g. 20 a, may comprise a plurality of non-volatile memory cells. The non-volatile memory cells that form the subgroup of cells 20 a, 20 b or 20 c, may be stack gate floating gate, split gate floating gate, or use charge trapping layer; or use phase changing material. Further, each of the cells may be a Single Level Cell (SLC) storing a single bit or a Multi-Level Cell (MLC) storing a plurality of bits. Similarly, the group 22 b comprises a plurality of subgroups 20 d, 20 e, and 20 f, each of which may comprise a plurality of non-volatile memory cells. A comparator 26, e.g. 26 a, is associated with a subgroup, e.g. 20 a of non-volatile memory cells. Finally, a reference non-volatile memory cell 30 is associated with each group 22 of non-volatile memory cells, and the associated comparators 26(a-c). Alternatively, each comparator 26 may have a different reference cell 30 associated therewith. In the preferred embodiment, the reference cell 30 is of the same structure as the non-volatile memory cells in the array 20. Thus, the circuits to program, erase, and read the non-volatile memory cells in the array 20 can also be used for the reference cells 30. Each comparator, e.g. 26 a has one input connected to the reference non-volatile memory cell, e.g. 30 a, and the other input connectable to one of the non-volatile memory cells 20 from the subgroup 20 a, with which the comparator 26 a is associated.

Unlike the prior art, each of the reference memory cells 30 is programmed to a read signal (which may be a voltage signal V_(ref) or a current signal I_(ref), depending on the characteristics of the non-volatile memory cell and the method used to read it) different from the other reference memory cell 30. This difference is used to compensate for the read offset I_(offset) or V_(offset) resulting from process and other variations in the individual comparators. In the case where the read signal is a current signal, I_(ref)=I_(T)+I_(offset). In the case where read signal is a voltage signal, V_(ref)=V_(T)+V_(offset). I_(T) or V_(T) is the target effective reference level which differentiates between data “0” and “1” in memory data cells. This level is generally selected based on memory cell and sensing circuit characteristics. Thus, process variations during the manufacturing of the device 10, (especially for the comparators 26(a-c) associated with reference cell 30 a and comparators 26(d-f) associated with reference cell 30 b) may be compensated by being able to program each reference cell 30 to a different level. In this manner, the operating window for the device 10 may be tightened.

To program each of the non-volatile reference memory cell 30 to a different read signal than the other non-volatile reference memory cell 30 in order to compensate for comparator offsets, there are three methods.

Referring to FIG. 2A there is shown a block level diagram of the device 110 capable of performing the first method of the present invention. The device 110 is similar to the device 10 and hence, like numerals will be used to designate like parts. The device 110 has an array 20 of non-volatile memory cells, divided into a plurality of subgroups of non-volatile memory cells 20(a-c) formed in a group 22 a. Although only three subgroups 20(a-c) are shown forming one group 22 a, it is clear that there are other groups 22 x, with other subgroups 20 x forming the array 20 of non-volatile memory cells. In addition, each subgroup, e.g. 20 a has an associated comparator 26 a, Finally a reference cell 30 a is associated with the group 22 a of non-volatile memory cells, similar to that described and shown in FIG. 1.

A read out signal from non-volatile memory cells from each subgroup, e.g. 20 a is supplied, along the bit line, to one input of the associated comparator, e.g. 26 a through an associated switch 42 a. Another input to each of the comparators 26(a-c) is supplied from the reference cell 30 a. During the read operation, the comparator 26 generates data “0” if the read signal from the one input represents over-programmed state as compared to the read signal from the other input (e.g. I_(data)<I_(ref)−I_(offset)), and data “1” if otherwise. The output data of each comparator 26 is supplied to a programming circuit 40, which controls the programming of the reference cell 30 and of data cells in the array 20. The one input of each comparator 26 is also connected to a source 50 (either current source or voltage source) through another switch 48. The source 50 is set to the target effective reference level I_(T) or V_(T). The source 50 can be a circuit on board with the integrated circuit device 110 or it can be supplied external to the device 110, as in for example, a pad used during testing. An inverter 44 is connected to the switches 42(a-c). A switch signal 46 is supplied to the inverter 44 and the other switch 48.

In operation, the switch signal 46 is first activated such that the transistor 48 is on and transistors 42(a-c) are off, thereby causing the signal from the source 50 to be supplied to each of the comparators 26. The reference cell 30 a is erased. The programming circuit 40 then weakly programs the reference cell 30 a. As used herein, the condition of this initial program operation (i.e. weakly program) is chosen so that the reference cell 30 a is not over-programmed, as verified by a subsequent read which is discussed below. A read operation of the reference cell 30 a is performed and the read signal is compared to the signal from the source 50 using the comparators 26(a-c). If the reference cell 30 a is current based, the current I_(ref) read from the reference cell 30 a is compared to the current I_(T) from the source 50. In the event that the reference cell 30 a is under programmed (i.e. data=“0”, corresponding to I_(ref)>I_(T)+I_(offest)) for more than 50% of the comparators 26 in the group 22 a with which the reference cell 30 a is associated, then the programming circuit 40 causes further programming of the reference cell 30 a.

When additional programming of the reference cell 30 a occurs, the conditions of programming may be changed so that the rate of electron injection for programming remains the same as previously, thereby maintaining a substantially constant rate of electron injection. As is well known to those skilled in the art, the condition of under programming of I_(ref)>I_(T)+I_(offset) is caused by more current flowing in the channel of the reference cell 30 a, due to less electrons being stored on the floating gate. Of course, with other types of non-volatile memory cells, the condition of under programming may not necessarily result in I_(ref)>I_(T)+I_(offset). Once the reference cell 30 a is programmed to the correct state, (i.e. data=“1”, corresponding to I_(ref)<I_(T)+I_(offset), for more than 50% of the comparators 26 in the group 22 a with which the reference cell 30 a is associated) programming of the reference cell 30 a is completed. Other reference cells 30 in the circuit are programmed similarly. Programming of multiple reference cells 30 can be done in parallel or in series. When reference cells 30 are programmed in parallel, those reference cells 30 which have passed verification are deselected to prevent them from being programmed further, while programming continues for those reference cells 30 which have not passed verification. Once programming of all reference cells 30 is completed, the switch signal 46 is reversed to prepare for normal data write and read operations. This causes the switch 48 to be turned off, and transistors 42(a-c) to be turned on, resulting in the one input for each comparator 26 being supplied with the signal from the non-volatile memory data cells in the subgroup 20 with which the comparator 26 is associated. A flow chart of this method is schematically shown in FIG. 2B.

Referring to FIG. 3A there is shown a block level diagram of the device 210 capable of performing the second method of the present invention. The device 210 is similar to the device 110 and device 10 and hence, like numerals will be used to designate like parts. The device 210 has an array 20 of non-volatile memory cells, divided into a plurality of subgroups of non-volatile memory cells 20(a-c) formed in a group 22 a. Although only three subgroups 20(a-c) are shown forming one subgroup 22 a, it is clear that there are other groups 22 x, with other subgroups 20 forming the array 20 of non-volatile memory cells. In addition, each subgroup, e.g. 20 a has an associated comparator, e.g. 26 a. Finally a reference cell 30 a is associated with the group 22 a of non-volatile memory cells, similar to that described and shown in FIGS. 1 and 2A.

Read out from non-volatile memory cells from each subgroup, e.g. 20 a is supplied, along the bit line, to one input of the associated comparator, e.g. 26 a. In addition, the read out is supplied to a source 60 such as an output bonding pad, such that the read-out may be measured. Another input to each of the comparators 26(a-c) is supplied from the reference cell 30 a. During the read operation, the comparator 26 generates data “0” if the read signal from the one input represents over-programmed state as compared to the read signal from the other input (e.g. I_(data)<I_(ref)−I_(offset)) and data “1” if otherwise. A programming circuit 40 controls the programming of the reference cell 30, as well as each non-volatile memory cell within each subgroup 20.

In operation, the reference cell. 30 a and data cells in the subgroups 20(a-c) are first erased. The programming circuit 40 then weakly programs the reference cell 30 a. The condition of this initial reference cell program operation is chosen so that the reference cell 30 a is not to be over-programmed, as verified by a subsequent verification discussed below. The programming circuit 40 then softly programs each of the non-volatile memory data cells in the group 22 a, with which the reference cell 30 a is associated. Again, the condition of this initial data cell program operation is set so that the data cells are not to be over-programmed, as verified by a subsequent read discussed below. A read operation is performed on each of the data cells in subgroups 20(a-c) and on the reference cell 30 a, and the read signals are compared by the comparators 26. If any of the data cells is under programmed (i.e. data is “1”, corresponding to I_(data)>I_(ref)−I_(offset)), then the programming circuit 40 is activated to further program the data cells which read “1”, while the data cells which read “0” are deselected to prevent them from being programmed further. When additional programming of the data cells occurs, the conditions of programming may be adjusted so that the rate of electron injection for programming is the same as previously, thereby maintaining a substantially constant rate of electron injection.

Alternatively, to save time, rather than programming all of the data memory cells in each of the subgroups 20(a-c), a select few (even as few as one) memory cells may be chosen from each subgroup 20(a-c) to be programmed and compared at this step. After all chosen data cells are sufficiently programmed to read “0”, the programmed chosen data cells are read and the read signals are individually supplied to the source 60 to be measured. The median value I_(med) of the read signals from data cells associated with the same reference cell 30 a, is then calculated. The calculated median value I_(med) is numerically compared to a target value I_(Tdata), which is the expected read signal from a typical programmed data cell which first passes verification with the target effective reference level I_(T). The target value for a “typical programmed data cell” I_(Tdata), corresponds to slightly over-programmed charge state compared to the target effective reference level I_(T), due to the finite change in data cell charge state after every program operation. Thus, I_(Tdata)=I_(T)−I_(overshoot), the difference between I_(T) and I_(Tdata), can be derived from data cell programming characteristics. When I_(med) reaches I_(Tdata) the method stops. However, in the event I_(med) has not reached I_(T), then the programming circuit 40 is activated to further program the reference cell 30 a. When additional programming of the reference cell occurs, the conditions of programming may be adjusted so that the rate of electron injection for programming is the same as previously, thereby maintaining a substantially constant rate of electron injection. A flow chart of this method is schematically shown in FIG. 3B. Other reference cells 30 in the circuit are programmed similarly. Programming of multiple reference cells can be done in parallel or in series. When reference cells are programmed in parallel, those reference cells which have passed verification are deselected to prevent them from being programmed further, while programming continues for those reference cells which have not passed verification.

Referring to FIG. 4A there is shown a block level diagram of the device 310 capable of performing the third method of the present invention. The device 310 is similar to the device 210 and the device 110 and device 10 and hence, like numerals will be used to designate like parts. The device 310 has an array 20 of non-volatile memory cells, divided into a plurality of subgroups of non-volatile memory cells 20(a-c) formed in a group 22 a. Although only three subgroups 20(a-c) are shown forming one subgroup 22 a, it is clear that there are other groups 22 x, with other subgroups 20 forming the array 20 of non-volatile memory cells. In addition, each subgroup, e.g. 20 a has an associated comparator 26 a. Finally a reference cell 30 a is associated with the group 22 a of non-volatile memory cells, similar to that described and shown in FIGS. 1, 2A, and 3A.

Read out from non-volatile memory cells from each subgroup, e.g. 20 a is supplied, along the bit line, to one input of the associated comparator, e.g. 26 a. In addition, the read out is supplied to a first source 60 such as an output bonding pad, such that the read-out may be measured. Another input to each of the comparators 26(a-c) is supplied from the reference cell 30 a. During read, the comparator 26 generates data “0” if the read signal from the one input represents over-programmed state as compared to the read signal from the other input (e.g. I_(data)<I_(ref)−I_(offset)), and data “1” if otherwise. The reference cell 30 a may also be read out and supplied to a second source 62, such as an output bonding pad, such that the read out of the reference cell 30 a may be measured. A programming circuit 40 controls the programming of the reference cell 30, as well as each non-volatile memory cell within each subgroup 20.

In operation, the reference cell 30 a and data cells in the subgroups 20(a-c) are first erased. The programming circuit 40 then weakly programs the reference cell 30 a. The condition of this initial reference cell program operation is chosen so that the reference cell 30 a is not to be over-programmed, as verified by a subsequent verification discussed below. The reference cell 30 a is read and the signal level so read is supplied to the second source 62, where the current/voltage is measured. The measured read signal from the reference cell 30 a I_(ref) is then numerically compared to a target level I_(T+). I_(T+) is chosen to represent a slightly under-programmed charge state as compared to the target effective reference level I_(T), i.e. I_(T+)>I_(T), and (I_(T+)−I_(T)) is larger than expected I_(offset) generated by any of the comparators 26 in the circuit. If I_(ref)>I_(T+) then the programming circuit 40 is activated to further program the reference cell 30 a. When additional programming of the reference cell occurs, the conditions for programming may be adjusted so that the rate of electron injection for programming is the same as previously, thereby maintaining a substantially constant rate of electron injection. Once I_(ref) reaches I_(T+), then the programming circuit 40 weakly programs each of the non-volatile memory data cells in the group 22 a, with which the reference cell 30 a is associated. The condition of this initial data cell program operation is chosen so that any of the data cells is not to be over-programmed, as verified by a subsequent read discussed below.

A read operation is performed on the data cells in each subgroup 20(a-c) and on the reference cell 30 a, and the results are compared by the comparators 26. If any of the data cells are under programmed, i.e. data is “1”, corresponding to I_(data)>(I_(ref)−I_(offset)), then the programming circuit 40 is activated to further program the data cells in the group 22 a which read data “1” while data cells which read data “0” are deselected to prevent them from being programmed further. When additional programming of the data cells occurs, the conditions for programming may be adjusted so that the rate of electron injection for programming is the same as previously, thereby maintaining a substantially constant rate of electron injection. Alternatively, to save time, rather than programming all of the data memory cells in each of the subgroups 20(a-c), a select few (even as few as one) memory cell may be chosen from each subgroup 20(a-c) to be programmed and compared at is step. After all chosen data cells are sufficiently programmed to read “0”, the programmed data cells are read and the read signals are individually supplied to the source 60 to be measured. The median value I_(med) of the read signals from chosen data cells associated with the same reference cell 30 a, is then calculated. The calculated median value I_(med) is used to define a read signal target I_(T′) for the reference cell 30 a, where I_(T′)=I_(T)−I_(T+)+I_(med)+I_(overshoot). Once I_(T′) is defined and calculated, the reference cell 30 a is then further programmed by the programming circuit 40. The reference cell 30 a is read and the signal level so read is supplied to the second source 62, where the read signal is measured. The measured read signal from the reference cell 30 a I _(ref) is then numerically compared to the target level I_(T′). In the event the reference cell 30 a is under programmed, i.e. I_(ref)>I_(T′) then the programming circuit is activated again to further program the reference cell 30 a. When additional programming of the data cells occurs, the conditions for programming may be adjusted so that the rate of electron injection for programming is the same as previously, thereby maintaining a substantially constant rate of electron injection. In the event the reference cell 30 a has reached the target I_(T), i.e. I_(ref)<I_(T′) then the method ends. A flow chart of this method is schematically shown in FIG. 4B. Other reference cells 30 in the circuit are programmed similarly. Programming of multiple reference cells can be done in parallel or in series. When reference cells are programmed in parallel, those reference cells which have passed verification are deselected to prevent them from being programmed further, while programming continues for those reference cells which have not passed verification. 

1. A non-volatile memory device comprising: an array of non-volatile memory cells; a first plurality of non-volatile memory reference cells, each capable of being programmed to a reference level different from the other reference cells; and a second plurality of comparators, each connectable to one of said first plurality of non-volatile memory reference cells and to one of a third plurality of memory cells from among said array of non-volatile memory cells.
 2. The device of claim 1 wherein each of said second plurality of comparators is connectable to a different one of said first plurality of non-volatile memory reference cells.
 3. The device of claim 1 wherein the second plurality is divided into groups of comparators, with each group having a fourth plurality of comparators, and each of the group of said second plurality of comparators is connectable to a different one of said first plurality of non-volatile memory reference cells.
 4. The device of claim 1 wherein each memory cell is an SLC memory cell.
 5. The device of claim 1 wherein each memory cell is an MLC memory cell.
 6. The device of claim 1 wherein each non-volatile memory reference cell is programmed to a reference voltage different from the voltage in the other reference cells.
 7. The device of claim 1 wherein each non-volatile memory reference cell is programmed to a reference current different from the current in the other reference cells.
 8. The device of claim 3 wherein each non-volatile memory reference cell which is connectable to a group of said second plurality of comparators is programmed to a median value of reference level for each group of comparators.
 9. A method of programming a first plurality of reference cells in a memory device having an array of non-volatile memory cells and a second plurality of comparators, comprising: (i) programming one of said first plurality of reference cells; (ii) reading said programmed reference cell and comparing same to a reference signal using one of said second plurality of comparators; wherein said one of said second plurality of comparators is associated with said one programmed reference cell (iii) continuing the programming of said one of said first plurality of reference cells based upon said comparison; and repeating the steps of (i)-(iii) for a different one of said first plurality of reference cells, and its associated comparators, until all of said first plurality of reference cells are programmed.
 10. The method of claim 9, further comprising: wherein the programming step (i), programs said first plurality of reference cells in parallel; wherein the reading step (ii) reads each of said programmed first plurality of reference cells and compares each to a reference signal using a different one of said second plurality of comparators, wherein a different one of said second plurality of comparators is associated with each one of said programmed first plurality of reference cells; wherein said method further comprising: deselecting the reference cells among said first plurality of reference cells which have passed verification after step (ii); and wherein the step of continuing (iii) continues the programming of reference cells which have not been deselected.
 11. The method of claim 9 wherein said continuing of programming is done by adjusting program conditions so as to maintain a substantially constant rate of electron injection.
 12. The method of claim 9 wherein said one of said first plurality of reference cells is associated with a third plurality of comparators, wherein said third plurality of comparators is a subset of said second plurality of comparators, and said reading step reads said programmed reference cells and the read signal is compared to a reference signal for each one of said third plurality of comparators.
 13. The method of claim 11 wherein the programming of said one of said first plurality of reference cells is continued in the event the reading of more than one half of said third plurality of comparators shows the reference cell is under programmed.
 14. The method of claim 9, wherein each reference cell from the first plurality of reference cells has an associated different comparator from the second plurality of comparators.
 15. A method of programming a first plurality of reference cells in a memory device having an array of non-volatile memory cells and a second plurality of comparators comprising: (i) programming one of said first plurality of reference cells; (ii) programming a third plurality of non-volatile memory cells, wherein said third plurality is associated with one of said second plurality of comparators; (iii) reading said third plurality of non-volatile memory cells using one of said second plurality of comparators; (iv) continuing the programming of said third plurality of non-volatile memory cells based upon said comparison; (v) measuring the read signals of the third plurality of non-volatile memory cells; (vi) calculating the median value of the signals from the measured signals of the third non-volatile memory cells; and (vii) continuing the programming of said one of said first plurality of reference cells based upon said calculation.
 16. The method of claim 15 further comprising: wherein the programming step (i) programs said first plurality of reference cells in parallel; wherein the reading step (iii) reads each of said plurality of non-volatile memory cells using a different one of said second plurality of comparators wherein the calculating step (vi) calculates the median value of the signals from the measured signals of the third non-volatile memory cells associated with a different one of each of said first plurality of reference cells; wherein said method further comprising: deselecting reference cells from said first plurality of reference cells based upon said calculation, after step (vi); and wherein the continuing step (viii) continues the programming of reference cells from the first plurality of reference cells which have not been deselected.
 17. The method of claim 15 further comprising: repeating the steps of (i)-(vii) for a different one of said first plurality of reference cells.
 18. The method of claim 15 wherein said continuing of programming is done by adjusting program conditions so as to maintain a substantially constant rate of electron injection.
 19. The method of claim 15 wherein said one of said first plurality of reference cells is associated with a third plurality of comparators, wherein said third plurality of comparators is a subset of said second plurality of comparators, and said reading step reads said programmed reference cells and the read signal is compared to a reference signal for each one of said third plurality of comparators.
 20. The method of claim 15, wherein each reference cell ftom the first plurality of reference cells has an associated different comparator from the second plurality of comparators.
 21. A method of programming a first plurality of reference cells in a memory device having an array of non-volatile memory cells and a second plurality of comparators comprising: (i) programming one of said first plurality of reference cells; (ii) measuring the read signal of the programmed reference cell; (iii) comparing the read signal of the programmed reference cell measured to a first pre-determined value; (iv) continuing the programming of said first plurality of reference cells based upon said comparison; (v) programming a third plurality of non-volatile memory cells, wherein said third plurality is associated with one of said second plurality of comparators; (vi) reading said third plurality of non-volatile memory cells programmed using one of said second plurality of comparators; (vii) continuing the programming of the third plurality of non-volatile memory cells based upon said reading; (viii) measuring the read signals of the third plurality of non-volatile memory cells; (ix) calculating the median value of the read signals from the third plurality of non-volatile memory cells measured; (x) continuing the programming of said one of said first plurality of reference cells; (xi) measuring the read signal of the programmed reference cell; (xii) comparing the read signal of the programmed reference cell measured to a second pre-determined value; and (xiii) continuing the programming of said first plurality of reference cells based upon said comparison.
 22. The method of claim 21 further comprising: repeating the steps of (i)-(x) for a different one of said first plurality of reference cells.
 23. The method of claim 21 wherein said continuing of programming is done by adjusting program conditions so as to maintain a substantially constant rate of electron injection.
 24. The method of claim 21 further comprising: wherein the programming step (i) programs said first plurality of reference cells in parallel; wherein the measuring step (ii) measures the read signal of each of the programmed first plurality of reference cells wherein the comparing step (iii) compares the measured read signal of each of the programmed first plurality of reference cells using a different one of the second plurality of comparators, wherein a different one of said second plurality of comparators is associated with each one of said programmed first plurality of reference cells; wherein the method further comprising: deselecting the reference cells among the first plurality of reference cells which have passed verification; wherein the continuing step (iv) continues the programming of the first plurality of reference cells which have not been deselected; wherein the reading step (vi) reads each of said third plurality of non-volatile memory cells using a different one of said second plurality of comparators; wherein the calculating step (ix) calculates the median value of the signals from the measured signals of the third non-volatile memory cells associated with a different one of each of said first plurality of reference cells; wherein said method further comprising: deselecting reference cells from said first plurality of reference cells based upon said calculation after step (ix); wherein the continuing step (x) continues the programming of references cells from the first plurality of reference cells which have not been deselected.
 25. The method of claim 21, wherein each reference cell from the first plurality of reference cells has an associated different comparator from the second plurality of comparators. 